GF100 Series Thermal Mass Flow Meters & Flow Controllers
Designed for semiconductor, MOCVD and other gas flow control applications that require a high-purity, all-metal flow path, the Brooks GF100 Series mass flow controllers deliver outstanding performance, reliability and flexibility. The GF100 Series has been marathon-tested to over three times the semiconductor industry standard for reliability, ensuring repeatable low-drift performance over time.
- Ultra-fast 300-millisecond settling time
- Optional pressure transient insensitive (PTI), high accuracy and safe delivery system models available
- MultiFlo™ gas and range configurability
- Corrosion-resistant Hastelloy® sensor tube and valve orifice (jet)
GF40/80 Series Thermal Mass Flow Meters & Flow Controllers
Designed for solar thin film deposition, CVD, vacuum processes, bioreactors and other industrial gas flow control applications that require cost-efficient solutions.
- Elastomer or metal seal
- Fast sub 1 second settling time
- MultiFlo gas and range configurability
- Corrosion-resistant Hastelloy sensor tube
GF100 Series Ultra-High Purity Metal Seal Thermal Mass Flow Meter/Flow ControllerDesigned for semiconductor, MOCVD, and other gas flow control applications that require a high purity all-metal flow path, the Brooks GF100 Series mass flow controllers deliver outstanding performance, reliability, and flexibility. Highlights of the GF100 series industry leading features include: ultra fast 300 millisecond settling time, MultiFlo™ gas and range programmability, optional pressure transient insensitivity (PTI), local display, extremely low wetted surface area, and corrosion resistant Hastelloy® sensor tube and valve seat. The GF100 series has been marathon tested to over three times the semiconductor industry standard for reliability, ensuring repeatable low-drift performance over time. An independent diagnostic/service port permits users to troubleshoot or change flow conditions without removing the mass flow controller from service.
The flagship GF125 is a second generation multi-variable, pressure transient insensitive mass flow controller. This product builds upon Brooks' leadership position in pressure transient insensitive (PTI) mass flow controller technology, minimizing process gas flow variation due to pressure and temperature fluctuations. The GF125 enables customers to simplify and reduce the size and cost of gas panels by eliminating the need for point of use pressure regulators, pressure transducers, and associated hardware.
MultiFlo™ gas and range programmability, a patented technology developed and refined by Brooks over the last 10 years, has changed the mass flow controller industry by offering customers the ability to select new gas calibrations and full scale ranges without the trouble and cost of removing the mass flow controller from the gas line. The GF100 Series fourth generation MultiFlo technology continues to lead the market with the most accurate and broadest range performance through extensive refinement and physical validation on critical process gases.
GF125 (HA) Ultra-High Purity High-Accuracy Metal Seal Mass Flow Controller or Flow MeterThe GF125 High Accuracy (HA) is a gas and range specific model for critical gas process applications requiring the widest working range with tightest flow control accuracy. A typical application is for multi-step processes requiring a high flow rate (up to 10 slpm) and a very accurate low flow rate. Traditionally this has been addressed by using two mass flow controllers. With the GF125 (HA) superior low setpoint accuracy, it is often possible to replace two (a high and low flow) mass flow controllers with one, providing immediate cost savings while freeing up a gas line for greater gas panel flexibility.
GF120 (SDS) Ultra-High Purity Safe Delivery System Metal Seal Mass Flow ControllerThe GF120 Safe Delivery System (SDS®) is Brooks' state-of-the-art low pressure drop mass flow controller for the delivery of sub atmospheric safe delivery system (SDS) gases used in Implant and Etch processes. The Brooks GF120 (SDS) models are available in full scale flow ranges 4-25 sccm (option GF120XSL) or >25 sccm to 1 slpm (option GF120XSD). These expensive, hazardous gases are adsorbed onto a solid medium within the gas cylinder, remaining below atmospheric pressure despite containing up to 15 times more dopant than conventional pressurized sources.
GF40/80 Elastomer and Metal Seal Digital Mass Flow Controllers and Flow MetersBrooks GF40 (elastomer seal) and GF80 (metal seal) thermal mass flow controllers (MFCs) and thermal mass flow meters (MFMs) achieve unprecedented performance, reliability, and flexibility in many gas flow measurement and control applications.
At the heart of the GF40/GF80 is Brooks' patented 4th generation MultiFlo
TM capable device. MultiFlo overcomes a long-standing limitation of many thermal MFCs ? when changing gas types, a simple correction factor, such as the ratio of heat capacities between the calibration gas and new gas, cannot account for accuracy-robbing viscosity and density differences. The Brooks MultiFlo database is built on thousands of native gas runs to establish correction functions that account for both thermal and physical differences among gases making the GF40/GF80 Series among the most accurate and flexible MFCs/MFMs available today.
The Brooks GF40/GF80 Series is the perfect choice for customers who use thermal mass flow controllers or thermal mass flow meters on a variety of gases, who need to change gas type frequently, or who need to re-range while preserving gas measurement and control accuracy. Some examples:
- OEMs will reduce the number of gas- and range-specific MFCs that they inventory
- Solar, biotech, CVD, plasma, glass, web coating, nanotechnology, vacuum processing and similar large users of mass flow meters and mass flow controllers will greatly reduce their gas- and range-specific spares inventory
- R&D, research, and laboratory users can quickly change experiment conditions and achieve much better actual process gas accuracy vs traditional mass flow controllers and mass flow meters
MultiFlo programming is simple and fast ? a new gas and range can be programmed under 60 seconds plus the device can be programmed without removing it from service or disconnecting the device from any process or tool control system.
