SLA5800 Series: Digital Thermal Mass Flow Meter/Flow Controller, Elastomer Seals
Brooks SLA5800 Series elastomer sealed digital thermal mass flow measurement and control products offer unparalleled flexibility and performance. They offer faster response, better accuracy and improved control over traditional analog devices. Industry leading repeatability ensures a stable process even under changing conditions. Self diagnostics and alarms eliminate downtime. These devices are globally approved for use in a variety of service areas.
5800S Series Digital Thermal Mass Flow Meter/Flow Controller, Elastomer Seals
The Brooks Model 5800S elastomer sealed digital flow controller expands the capability and functionality of Brooks’ Smart Mass Flow Products. Brooks’ proprietary Adaptive Valve Control makes these products virtually insensitive to process interference, ensuring unparalleled performance and fast control, even under varying process conditions. Models available with analog or digital I/O.
4800 Series:
Thermal Mass Flow Meter/Flow Controller, Elastomer Seals
The Brooks 4800 Series of mass flow meters and mass flow controllers is an excellent choice for measurement and control of many common gases. It offers a broad flow range, fast response time, compact size, and many other benefits for a variety of applications. The 4800 Series utilizes a Micro Electric Mechanical (MEMS) based thermal sensor that achieves extremely fast response times. It is ideally suited for OEMs. The optional Local Operator Interface provides a convenient user interface to view, control, and configure the 4800 Series devices.
5850E: Analog Thermal Mass Flow Controller, 3 - 30,000 sccm, Elastomer Seals
The Brooks Model 5850E elastomer sealed analog mass flow controller accurately measures and controls gas flows of 3 - 30,000 sccm (Nitrogen). Brooks’ extremely stable flow sensor provides reliable, repeatable and accurate flow measurement even under varying process conditions. It eliminates the need for continuous monitoring and readjustment of gas pressures to provide a stable gas flow.
5851E: Analog Thermal Mass Flow Controller, 10 - 100 slpm, Elastomer Seals
The Brooks Model 5851E elastomer sealed analog mass flow controller accurately measures and controls gas flows of 10 - 100 slpm (Nitrogen). Brooks’ extremely stable flow sensor provides reliable, repeatable and accurate flow measurement even under varying process conditions. It eliminates the need for continuous monitoring and readjustment of gas pressures to provide a stable gas flow.
5853E: Analog Thermal Mass Flow Controller, 100 - 1,000 slpm, Elastomer Seals
The Brooks Model 5853E elastomer sealed analog mass flow controller accurately measures and controls gas flows of 100 - 1,000 slpm (Nitrogen). Brooks’ extremely stable flow sensor provides reliable, repeatable and accurate flow measurement even under varying process conditions. It eliminates the need for continuous monitoring and readjustment of gas pressures to provide a stable gas flow.
5860E: Analog Thermal Mass Flow Meter, 3 - 30,000 sccm, Elastomer Seals
The Brooks Model 5860E elastomer sealed analog mass flow meter accurately measures gas flows of 3 - 30,000 sccm (Nitrogen). Brooks’ extremely stable flow sensor provides reliable, repeatable and accurate flow measurement even under varying process conditions. It eliminates the need for continuous monitoring and readjustment of gas pressures to provide a stable gas flow.
5861E: Analog Thermal Mass Flow Meter, 10 - 100 slpm, Elastomer SealsThe Brooks Model 5861E elastomer sealed analog mass flow meter accurately measures gas flows of 10 - 100 slpm (Nitrogen). Brooks’ extremely stable flow sensor provides reliable, repeatable and accurate flow measurement even under varying process conditions. It eliminates the need for continuous monitoring and readjustment of gas pressures to provide a stable gas flow.
5863E: Analog Thermal Mass Flow Meter, 100 - 1,000 slpm, Elastomer Seals
The Brooks Model 5863E elastomer sealed analog mass flow meter accurately measures gas flows of 100 - 1,000 slpm (Nitrogen). Brooks’ extremely stable flow sensor provides reliable, repeatable and accurate flow measurement even under varying process conditions. It eliminates the need for continuous monitoring and readjustment of gas pressures to provide a stable gas flow.
5850i: Analog Thermal Mass Flow Controller, 3 - 30,000 sccm, Elastomer Seals
The Brooks Model 5850i mass flow controller accurately measures and controls gas flows of 3 - 30,000 sccm (Nitrogen). Brooks’ extremely stable flow sensor provides reliable, repeatable and accurate flow measurement even under varying process conditions. It eliminates the need for continuous monitoring and readjustment of gas pressures to provide a stable gas flow.
5851i: Analog Thermal Mass Flow Controller, 10 - 100 slpm, Elastomer SealsThe Brooks Model 5851i elastomer sealed analog mass flow controller accurately measures and controls gas flows of 10 - 100 slpm (Nitrogen). Brooks’ extremely stable flow sensor provides reliable, repeatable and accurate flow measurement even under varying process conditions. It eliminates the need for continuous monitoring and readjustment of gas pressures to provide a stable gas flow.
5853i: Analog Thermal Mass Flow Controller, 100 - 1,000 slpm, Elastomer SealsThe Brooks Model 5853i elastomer sealed analog mass flow controller accurately measures and controls gas flows of 100 - 1,000 slpm (Nitrogen). Brooks’ extremely stable flow sensor provides reliable, repeatable and accurate flow measurement even under varying process conditions. It eliminates the need for continuous monitoring and readjustment of gas pressures to provide a stable gas flow.
5860i: Analog Thermal Mass Flow Meter, 3 - 30,000 sccm, Elastomer Seals
The Brooks Model 5860i elastomer sealed analog mass flow meter accurately measures gas flows of 3 - 30,000 sccm (Nitrogen). Brooks’ extremely stable flow sensor provides reliable, repeatable and accurate flow measurement even under varying process conditions. It eliminates the need for continuous monitoring and readjustment of gas pressures to provide a stable gas flow.
5861i: Analog Thermal Mass Flow Meter, 10 - 100 slpm, Elastomer SealsThe Brooks Model 5861i elastomer sealed analog mass flow meter accurately measures gas flows of 10 - 100 slpm (Nitrogen). Brooks’ extremely stable flow sensor provides reliable, repeatable and accurate flow measurement even under varying process conditions. It eliminates the need for continuous monitoring and readjustment of gas pressures to provide a stable gas flow.
5863i: Analog Thermal Mass Flow Meter, 100 - 1,000 slpm, Elastomer SealsThe Brooks Model 5863i elastomer sealed analog mass flow meter accurately measures gas flows of 100 - 1,000 slpm (Nitrogen). Brooks’ extremely stable flow sensor provides reliable, repeatable and accurate flow measurement even under varying process conditions. It eliminates the need for continuous monitoring and readjustment of gas pressures to provide a stable gas flow.
5850EM: Thermal Mass Flow Controller, 3 - 30,000 sccm, Metal SealsThe Brooks Model 5850EM metal sealed mass flow controller accurately measures and controls gas flows in ultraclean environments of 3 - 30,000 sccm (Nitrogen). Brooks’ extremely stable flow sensor provides reliable, repeatable and accurate flow measurement even under varying process conditions. It eliminates the need for continuous monitoring and readjustment of gas pressures to provide a stable gas flow.
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5851EM: Thermal Mass Flow Controller, 10 - 100 slpm, Metal SealsThe Brooks Model 5851EM metal sealed mass flow controller accurately measures and controls gas flows in ultra-clean environments of 10 - 100 slmp (Nitrogen). Brooks’ extremely stable flow sensor provides reliable, repeatable and accurate flow measurement even under varying process conditions. It eliminates the need for continuous monitoring and readjustment of gas pressures to provide a stable gas flow.
With the largest installed base of thermal mass flow controllers and flow meters around the world, Brooks offers products with faster response, better accuracy and improved control over analog devices.
