Brooks' LF200 Series ultrasonic liquid flow controllers feature an all-PFA wetted flowpath that is chemically inert and solvent resistant to virtually all chemicals, making the LF200 ideal for controlling flows of high purity and ultra-high purity liquids, de-ionized (and other highly pure) water, acids, bases, or similar fluids. In addition, the flow path is straight, permitting the LF200 liquid flow controller to measure complex dual-phase fluids like CMP slurries without imparting any shear force that could damage the fluid or cause agglomeration. The LF200 liquid flow controller employs a bi-directional, ultrasonic transit-time measurement technique and advanced signal processing algorithms to provide highly accurate flow measurement and control even in the presence of bubbles. Needle valve and pinch valve options are available.

• Chemically inert flow path
• Straight-through flow path with no bends or sharp turns
• Very compact size
• +/- 1% of rate accuracy available

Proprietary conical ultrasonic sensor and signal processing algorithms provide 30X improvement in signal to noise ratio over the competition and enable industry leading 1% set-point accuracy. Even for ultra-low flow rates (<50 ml/min), the Brooks LF200 Series can perform with a repeatability within +/-0.5 ml/min.

Performance	LF200/LF205	LF210/LF215
Full Scale Flow Range	50-500 ml/min (LF200) 50-1000 ml/min (LF205)	150-500 ml/min (LF210) 150-1000 ml/min (LF215)
Control Range	5-100% F.S.
Accuracy	+/- 1% of SP, 50 to 1000 ml/min +/- 0.75 ml/min, 25 to <50 ml/min +/- 0.75 ml/min, from 10-50 ml/min for 50 to 100 ml/min FS	+/- 3% of SP, 150 to 1000 ml/min +/- 5% of SP, 50 to <150 ml/min
Repeatability	+/- 0.5% of SP, 50 to 500 ml/min +/- 0.5 ml/min, 25 to <50 ml/min +/- 0.5 ml/min, 10-50 ml/min for 50 to 100 ml/min FS	+/- 1.5% of SP, 150 to 1000 ml/min +/- 2.5% of SP, 50 to <150 ml/min
Response Time	<3 sec; <5s for 50 ml/min FS; please consult factory for faster response time
Shut-Off Time	<2 sec
Zero Offset	<+/- 1% of 500 ml/min FS output
Temperature Coefficient	0.05% of FS/Deg C	0.2% of FS/Deg C