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Ultrasonic Liquid Flow Controllers
Home > Product > Mass Flow Controller (BROOKS) > Ultrasonic Liquid Flow Controllers

LFC-LF200Brooks' LF200 Series ultrasonic liquid flow controllers feature an all-PFA wetted flowpath that is chemically inert and solvent resistant to virtually all chemicals, making the LF200 ideal for controlling flows of high purity and ultra-high purity liquids, de-ionized (and other highly pure) water, acids, bases, or similar fluids. In addition, the flow path is straight, permitting the LF200 liquid flow controller to measure complex dual-phase fluids like CMP slurries without imparting any shear force that could damage the fluid or cause agglomeration. The LF200 liquid flow controller employs a bi-directional, ultrasonic transit-time measurement technique and advanced signal processing algorithms to provide highly accurate flow measurement and control even in the presence of bubbles. Needle valve and pinch valve options are available.
  • Chemically inert flow path
  • Straight-through flow path with no bends or sharp turns
  • Very compact size
  • +/- 1% of rate accuracy available

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