Brooks offers a new generation of displays for on-tool gas panel applications and ruggedized displays for off-tool and bulk gas delivery applications. Our high-visibility displays provide local readout of pressure components for optimal point-of-application monitoring. Our multi-channel controllers provide programmable alarms and set points for monitoring pressure and liquid levels, while the instant and accurate readout at the component allows customers to troubleshoot and make necessary corrections immediately. Brooks displays can be used for applications that include bulk gas, gas cabinets, gas distribution, wafer polishing, epitaxial layer, oxidation, CVD, ion implant, diffusion, PVD and dry etch.
0254 Gas and Liquid Mass Flow Secondary Electronics, 4 channels
The Brooks 0254 is a four-channel power supply, readout, and set point controller. This innovative, reliable microcomputer-based controller provides power for up to four Brooks thermal mass flow, Quantim Coriolis mass flow, and/or pressure devices; all in a new compact design. Additionally, the 0254 can be used to generate flow setpoint commands, display flow rate, totalize flow, for blending multiple flow streams, and more. This fully RoHS compliant device has a very user-friendly operation and is offered with multiple mounting capabilities such as rack mount, panel mount, and table-top mount.
LR250 2-Channel Displays and Controllers
The Brooks LR250 series 2-channel display and controller is designed to interface with analog sensors and actuators while providing connectivity to LON-based data acquisition and control networks. The display's analog input module includes a high impedance differential input architecture combined with a precision low-noise, 24-bit sigma delta analog-to-digital converter to provide superior accuracy and temperature stability. The 1/8 DIN aluminum enclosure and shielded membrane keypad provides immunity to ESD, RFI, and EMI.
SLR Tranducer Displays
The Brooks SLR series transducer display is a minature digital transducer display for use on 1.125 inch surface substrate. It is designed to interface to transducers with 30 PSI and 100 PSI full scale pressure ranges. The SLR series utilizes a Light Emitting Diode (LED) with two selectable engineering units (PSI and KPa) can can be rotated to be positioned at all four quadrants.
The SLR series has increased noise immunity and proprietary designs to provide extremely accurate pressure readings, even in the most challenging environments. The SLR series is electricaly interfaced using a high-density 15-pin D-Sub connector. The device uses an externally supplied 13 to 32 VDC excitation which in turn is supplied to the mating Brooks pressure transducer.
TD100 Pressure Transducer Displays
Local display of process pressure improves safety and quality control of the gas delivery systems. The Brooks TD100 series pressure transducer displays allow a 4-20mA sensor to digitally display its pressure and send its signal to a final destination. A sensor, such as the Brooks SS2 (formerly SolidSense II) pressure transducer, connects to either the back or bottom of the TD100 with a 4-pin Bendix connector. The TD100 connects to the loop through either a 6-wire pigtail cable or a 4-pin mail Bendix connector. The TD100 offers a real time reading. It is loop powered, single channeled, and can swivel around the transducer so the viewing angle can be adjusted. The display has red LED lighting for easy reading in low ambient light. The TD100 has two adjustable alarm setpoints.