TOPMENU : HOME | CONTACT US | ADMIN



  Mass Flow Controller (BROOKS)
  Vacuum Components
  PBN (Monentive Performance Material)
   - Heater & Chuck
   - Boat
   - Crucible
   - BN
  Thin Film Deposition Thickness Rate...
Thin Film Deposition
   
- STM-2XM
   - STC-2000A
   - STC-2002
   - STM-100/MF

Feed Throughs and Sensors

E-beam Technology
   - EBS 530
   - SRT 422

Liquid Level Sensing
   - SLL-N2
   - 500-245

  Vacuum Measurement (THYRACONT)
STC-2000A
Home > Product > Thin Film Deposition Thickness Rate... > Thin Film Deposition > STC-2000A

[Manual Download]

Deposition Rate Controller
The STC-2000A from Sycon offers features and performance not previously available in a thin film deposition controller. Its advanced electronics, LCD display, storage for 50 film programs, 9 process recipes and programmable input/output structure give the user versatility and performance. The STC-2000A uses the time-proven 6 MHz oscillating quartz crystal as the sensor device. The STC-2000A is constructed with advanced microprocessor technology. This enables the direct solution of the complex mathematical equation associated with the frequency shift versus mass loading characteristics of the quartz crystal sensor. Its computational power allows the measurement of the material accumulated on the sensor crystal to be accurately converted to film thickness using the exact equation; inaccuracies due to approximations and limited ranges of material constants do not contribute to thickness and rate errors. An innovative frequency measurement system allows the STC-2000A to acquire and display 10 measurements/second with 0.133 Å/s/measurement rate resolution on each of the sensor input channels. The standard STC-2000A is equipped with 8 relays, 8 opto-coupled inputs, an RS-232 computer interface, and high-resolution analog control and recorder outputs. A rack mount for half-rack mounting is also standard.
FEATURES:
· Multi Sequence Multi-Film Process Control
· High Resolution / High Speed Measurement Engine
· 10 Measurements per second @ 0.133 Å/s/measurement Rate resolution
· RS232 (optional RS485) interface for serial communications
· Easy to read LCD with touch panel interface
· Versatile I/O programming
· Industry standard 6 MHz crystals
SPECIFICATIONS:
Measurement Period (Speed)
· 0.1 second (10 measurements per second)
Frequency Resolution
· 0.03Hz
Thickness Resolution
· 0.0133 Angstrom for Aluminum
Rate Resolution
· 0.133 Angstrom per second per second
Accuracy
· 1 part per million (equal to +/- 5 Hz) absolute. 0.03 Hz/measurement relative.
Speed
· Ten measurements/second
Measurement Range
· 500KA Aluminum Equivalent
Standard Sensor Crystal
· 6 MHz AT cut, Plano/Convex
Sensors
· 2
Display
· 240 x 64 pixel monochrome LCD with Backlight and 4 user-programmable LEDs
Operation
· Menu driven Touch Panel LCD for Parameter Entry, 10 Membrane Keys (STOP, START, MENU, MANUAL, ZERO, STATUS and 4 user programmable keys)
Film Storage (Standard)
· 50 Film Programs, 9 Sequence recipes (99 layers each)
Film Parameters
· Material Density 0.4 to 99.99 gm/cc
· Material Z-Factor 0.1 to 9.999
Set-point Limits
· Thickness (2), Time (1)
Source Conditioning
· Rise (3) & Soak (3) Powers, Soak Times (2)
Rate Control
· 0.0 to 999.9 Å/s
External Storage (Optional)
· Save/Restore all Parameters, Configurations, Films, Processes, I/O programs (both A & B memories) and Process Accounting in a Transportable Data Module (Optional)
Hardware I/O (Standard: 1 output card, 1 input card)
· Output: 8 SPDT Relays, 1.0 Amp @ 24VDC
· Input: 8 Optocoupled Inputs, 5-24VDC(4 Slots are available for either input or output cards, 2 are populated with standard)
Interface Protocols
· RS-232C (Sycon Format or ASCII)
Analog Outputs
· +12 bit resolution on each of 2 outputs
Control Output
· 10ma, 0 to 10 volts (range programmable: 2.5, 5, 10 volts isolated)
Recorder Output
· 10ma, 0 to 10 volt programmable (rate, thickness, power, deviation, computer remote)
Power Control
· Automatic Three Mode (PID Control)Manual Hand Controller/Front Panel
Rack Mount
· 3 1/2" - half rack mount (std.)
Power
· 90-264 VAC, 50-60 Hz, 168 VA Max.
Weight
· 4.5 lb.
Operating Range
· 0 to 40°C ambient
업체명 : 중앙진공 | 대표자명 : 박종호 | 사업자번호 : 305-81-74027   
주소 : 대전광역시 대덕구 읍내동 225 | 전화번호 : 042-636-0050 | 팩스번호 : 042-635-5959 | 이메일 : vacuum@javacuum.com

COPYRIGHT (C) 2010 JOONGANGVACUUM. ALL RIGHTS RESERVED.