Vacuum Components
PBN (Monentive Performance Material)
Thin Film Deposition Thickness Rate...
Vacuum Measurement (THYRACONT)
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STC-2002
Home > Product > Thin Film Deposition Thickness Rate... > Thin Film Deposition > STC-2002
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[Manual Download]
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Expandable Thin Film Deposition Controller |
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The versatile and expandable STC-2002 will meet your Thin Film Deposition Control requirements from the simple to the most complex. Whether you are depositing a single layer, or a complex multi-layer film with simultaneous control of two materials, the STC-2002 will provide the highest accuracy and best control achievable from a quartz crystal deposition controller.
The STC-2002 employs an advanced measurement technique, which allows high accuracy reading to be made 10 times per second. The high-resolution measurements, along with a fast update rate, allow precise control of the deposition source to achieve the desired film quality. Sycon Instruments and the STC-2002 will meet your Thin Film Deposition needs – now, and in the future. |
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FEATURES: |
· High Resolution/High Speed measurement Engine for precise deposition control
· 10 Measurements per second @ 0.133Å/s/measurement rate resolution
· RS232/RS485 interface for serial communications
· Large format Numeric and graphic display with touch panel user interface
· Expandable, Up to 8 Source/Sensors, Multiprocessor design maintains performance
· Expandable, I/O, Up to 32 inputs or outputs for use with programmable logic
· Weighted averaging of up to 8 sensors for precise large area deposition
· Expandable Display Module (optional) for simultaneous depositions
· 4 user defined front panel buttons and user definable indicators for use with I/O programs
· Optional removable memory module for parameter storage and transfer |
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SPECIFICATIONS: |
Measurement Period (Speed)
· 0.1 second (10 measurements per second)
Frequency Resolution
· 0.03Hz
Thickness Resolution
· 0.0133 Angstrom for Aluminum
Rate Resolution
· 0.133 Angstrom per second per second
Crystal Sensor
· Industry standard 6 MHz
Thickness Display
· 0.000 to 999.9 K Å
Rate Display
· 0.00 to 999 Å/sec
Inputs
· 8 5 – 30VAC-DC or contact closure, Opto isolated
Outputs
· 8 Form C relays 24volts 1 A
Source Outputs
· +/- 2.5, 5, 10 volts @ 10 mA.
Parameter Storage
· 99 Films, 30 Resource Maps
Size
· 3 ½”h x 19”w x 8”d (2U full rack)
Weight
· 6.5 lbs.
Input Power
· 90 – 264 VAC 1.4 Amps rms
Base Configuration
· 2 source/sensor, 8 inputs and 8 outputs, RS232 communication. |
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