Vacuum Components
PBN (Monentive Performance Material)
Thin Film Deposition Thickness Rate...
Vacuum Measurement (THYRACONT)
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STM-100/MF
Home > Product > Thin Film Deposition Thickness Rate... > Thin Film Deposition > STM-100/MF
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[Manual Download]
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Thin Film Deposition Thickness/Rate Monitor |
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The Model STM-100/MF Thickness/Rate Monitor is a precision mass and film thickness measurement instrument for use in thin film deposition processes and other quartz crystal microbalance applications. The STM-100/MF has proven very tough and reliable. Easy to set up and use, the STM-100/MF is a world standard. |
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FEATURES: |
· Multi-Film Program Storage
· High Resolution and High Speed Measurement Engine
· 1 Å Thickness Resolution
· 0.1 Å/Sec. Rate Resolution
· 4 measurements per second
· Multiple function high readability Back-lit LCD
· Shutter and Limit I/O Relay Outputs
· Analog Output of Rate or Thickness ±0 to 10V 12 bit resolution
· Low Maintenance Sensor Design
· Industry Standard 6 MHz Sensing Crystal
· RS-232 Interface
· LabVIEWTM Front Panel Interface |
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SPECIFICATIONS: |
Multi-Mode Operation
· Thickness/Rate Monitor
· Negative Thickness Monitor
· Sensor Frequency Monitor
High Speed
· Four Measurements per second
High Resolution
· 0.1Å per second
High Accuracy
· ±0.5% thickness ±1 count
Measurement Range
· 500KÅ Aluminum Equivalent
Relay Output
· Four 1.5 Amp SPST N.O. Contacts
1) Shutter Control
2) Thickness Set point
3) Timer Set point
4) Crystal Failure
Remote Input
· Four TTL Compatible inputs
1) Open Shutter
2) Close Shutter
3) Zero Thickness
4) Zero Time
Setpoints
· End Thickness: 0.000 to 9999KÅ
· Setpoint Thickness: 0.000 to 9999KÅ
· Timer: 00:00 to 99:59 m:s
Power Requirement
· 120/240 VAC 50/60 Hz 2.5 VA |
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