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Electron Beam Sweep Controller

The Sycon EBS-530 Electron Beam Sweep Control generates a large number of precision sweep patterns for use with electron beam deposition sources. The user may select from the basic shapes (Circle, Figure-8, Line and Point) provided, or create user-defined patterns to optimize deposition control of metals and dielectric materials. Variations on the basic shapes can be created by applying the provided pattern modifiers. Pattern modifiers provided include power, sweep frequency, rotational speed and power profile.

Selecting or programming these sweep patterns is easily accomplished through the user-friendly front-panel touch screen LCD display. Up to 32 different sweep patterns can be stored within the unit. These different patterns can easily be selected from the front panel, remotely through back-panel remote input, or through the standard RS-232/RS-485 interface.

Starting with a fixed set of basic sweep patterns that are embedded in the Sweep Control, the user can design E-beam sweep patterns that are ideally suited to the characteristics of the source and deposition materials. The sweep patterns generated within the unit produce dual current outputs which can drive the X and Y sweep coils of most electron beam deposition sources.

The EBS-530 provides a calibration function to compensate for differences between types and brands of e-beam guns and provide optimum heating of the deposition material.

FEATURES:

• Powerful, easy to use calibration function allows compensation for irregularities in gun magnetics
• High Output Current: 0 - 5 Amps AC with 10 Ohm loads
• Drives Grounded or Floating Coils
• High Frequency Response: 500Hz for coils < 8mH, 200Hz for coils = 33mH
• Pattern Types: Circle, Fig-8, Line, Point and User
• PS2 Mouse / Remote Input· RS-232/RS-485 Communications Inputs
• Input Power: 85 to 265VAC, 50/60 Hz
• Power Factor = 0.99 at Maximum Coil Current

SPECIFICATIONS:

Output
Coil Output Current
· -5.0 to 5.0 Amps peak per coil (3.5A rms)
Coil Configurations
· 2 coils with one side grounded2 coils with each side floating
Output Frequency Response (X and Y)
· 500 Hz for coils<8mH200 Hz for coils=33mH
Maximum Coil Impedance @ 5 Amps Peak
· 10 Ohms
Nominal Cable Length
· 20 Feet

Patterns
Pre-defined Patterns
· Circle, Line, Figure 8, Point
User Patterns
· 32
X/Y Points per User Patterns
· 255 maximum

Pattern Parameters
Gain
· 0-110%
Power Profile
· Vary current density according to 1/RX
Shape
· Circle, Line, Figure 8, Point, User-defined
Spin Speed
· Rate of shape rotation
Shape Speed
· 0-1000 ms – the time needed to draw the shape once

User Interface
· 240 X 64 backlit LCD touchscreenDedicated system keys
Mouse/Remote Input
· PS2

Digital Input
· Pattern Select (1 of 4 or 1 of 32): Sweep On, Sweep Off, Interlock
Input Rating
· 5-36VAC/DC isolated or grounded non-isolated, contact closure
Digital Input Functions
· Safety/Water Interlock
Relay Rating/Output Functions
· SPST, 30V DC or RMS, 2 AmpSweep Ready, Sweep On
Communications
· RS-232/RS-485
Operating Temperature
· 0°C to 50°C
Cooling
· Forced air, one internal fan
Size
· 3.5in x 16.9in x 11.5in
Weight
· 10 lbs.
Input Power
· 85 to 265VAC, 50/60 Hz460 VA (10 Ohm coil R, 5A peak current in each coil)
Power Factor
· 0.99 at maximum coil current
Regulatory Compliance

[Manual Download]

E-Beam Source Rotation Controller

The SRT-422 E-Beam Source Indexer provides accurate, reliable rotation control of multiple-crucible electron beam sources. The standard unit is designed to work with a variety of e-beam sources with internal 4 to 1 rotation reduction. Crucible pocket location patterns are provided which cover the majority of e-beam source designs. The unit consists of two components: 1) a remotely-mounted control panel and power supply and 2) a compact stepper motor drive unit.

The compact motor drive unit supports applications where space under the base plate is at a premium. It attaches to the air side of a standard rotary vacuum feedthough. The indexer can be controlled automatically from deposition controllers (like Sycon’s STC-2000 series), manually from the front panel or remotely from system controllers. The RS-232 interface is included as a standard feature.

The indexer controls pocket sources in either a unidirectional or bi-directional manner. In the bi-directional mode it is programmed to take the shortest direction to the next pocket. In the retrograde and continuous-trough configuration the speed of rotation is selectable. Interlock signals are provided to prevent rotation of the multi-pocket while e-beam power is applied, and to prevent powering of the e-beam until the pocket is in the proper location. Custom variations are available for unique pocket patterns.

FEATURES:

· Easy Mounting
· Remote display
· Supports a variety of pocket configurations
· Up to eight pockets bi-directional
· UHV four-pocket sources and continuous trough source
· RS-232 interface with easy communication protocol
· Connects to Sycon controllers through I/O interface

SPECIFICATIONS:

Rotation modes
· 3 to 8 pocket source (uni- or bi-direction)
· Continuous trough source (1 of 7 speeds)
· UHV pocket sources (limited rotation)
· 4 - 3 pocket ‘banana’ types
Rotational speed
· Shaft speeds of up to 8.5 rpm
Path finding
· Quickest path (CW, CCW) for multi-pocket source
Torque
· 120 in-oz. at output shaft
Repeatability
· 1 degree resolution and repeatability
Data interface
· RS-232
Relay interface
· Allows control from system or deposition
Manual control
· Inputs/outputs for Remote Manual Control Panel
Safety interlocks
· Disallows rotation with beam power applied
Pocket Good indication
· Indicates selected pocket is reached or retrograde motion is in progress.
Size
· 5.0w x 5.0h x 4.5d plus 1” shaft extensions
Weight
· 3.5 lbs
Power requirement
· 115/230 Volts ac/10 watts